发明名称 WORK FILM AND PRODUCTION OF MULTILAYERED PRINTED CIRCUIT BOARD USING WORK FILM
摘要 <p>PROBLEM TO BE SOLVED: To provide a work film which is excellent in the improvement of accuracy in alignment and superior in workability at the time of placing the work film on the surface of a photosensitive insulating layer and subjecting the film to exposure, and a process for producing a multilayered printed circuit board using the same work film. SOLUTION: The work film (photomask film) on which position frames 2 enclosing position marks 3 and reference frames 4 enclosing the reference marks 5 adjacent thereto are formed and in which the annular reference marks 5 is made larger than the position marks 3, is used, thereby, the position marks 3 and position frames 2 of the work film (photomask film) are superposed on the reference marks 5 and reference frames 4 formed on a substrate 11, a first adhesive layer 15, a plating resist 16, etc.</p>
申请公布号 JPH09230578(A) 申请公布日期 1997.09.05
申请号 JP19960065494 申请日期 1996.02.26
申请人 IBIDEN CO LTD 发明人 HIRATSUKA SHINJI
分类号 G03F1/00;G03F1/68;H05K3/00;H05K3/18;H05K3/46;(IPC1-7):G03F1/08 主分类号 G03F1/00
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