| 摘要 |
PROBLEM TO BE SOLVED: To provide a display function by which an inspection worker can visually and easily recognize erroneous wiring by fetching actual image information of a semiconductor device where a wiring process completes and displaying the actual image and wiring pattern information in design on the same screen. SOLUTION: Actual image information on the semiconductor device where the wiring process completes is fetched and the actual image 51 and wiring pattern formation 52 on design are displayed in the same screen 53. The image of a desired part in the semiconductor device is taken in by an image pickup device, for example. A central processing unit calculates an image pickup range 51 from an image pickup scale factor at that time and the coordinate of a stage at the time of pickup and sets a display range 52 from wiring pattern information in CAD data by adjusting it to image pickup range 51. An image synthesis means provided for an image processor synthesizes the image pickup range 51 and the display range 52 so as to form an inspection image 53. The synthesized inspection image 53 is displayed on a display device. |
