METHOD AND DEVICE FOR EVALUATING SEMICONDUCTOR MATERIAL,申请号JP19960067209-传众专利搜索

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发明名称	METHOD AND DEVICE FOR EVALUATING SEMICONDUCTOR MATERIAL
摘要
申请公布号	JPH09232396(A)	申请公布日期	1997.09.05
申请号	JP19960067209	申请日期	1996.02.27
申请人	SUMITOMO SITIX CORP	发明人	FUJITO MANABU
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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