| 摘要 |
PROBLEM TO BE SOLVED: To estimate the deterioration property of a dielectric film by enabling the deterioration test of polarization of the dielectric film to be performed easily and quickly. SOLUTION: A transfer gate TG1 is set to on-condition and a transfer gate TG2 is set to off-condition by control signals applied to input terminals T1 and T2 , and a fixed voltage is applied to a measurement terminal T3 , and pulse signals generated by a ring oscillator ROSC in which a plurality of inverters are connected in series and besides in circular form on the same semiconductor substrate are applied in a specified time to the electrode of the ferroelectric capacitor C1 connected to a node ND2 through a buffer BUF and a transfer gate TG1 , and then the transfer gate TG1 is switched to off condition and the transfer gate TG2 to on condition so as to stop the application of the pulse signal to the ferroelectric capacitor C1 , and the property of the ferroelectric capacitor C1 is measured through a measurement terminal T3 and an output terminal TOUT. |
