发明名称 METHOD OF WIRE BONDING
摘要 PROBLEM TO BE SOLVED: To provide a method of wire bonding by which the displacement can be quickly detected and the productivity is enhanced. SOLUTION: Taking by camera an image of a semiconductor pellet 7 and the leads 8a surrounding the pellet 7, implementing individually image processing of the detected area a1, a2, b1, b2, b3, and so on defined in the image S picked up by camera, the displacements of electrodes 7a and leads 8a on the semiconductor pellet 7 are obtained.
申请公布号 JPH09232357(A) 申请公布日期 1997.09.05
申请号 JP19960060182 申请日期 1996.02.22
申请人 TOSHIBA MECHATRONICS KK 发明人 MATSUDA SUSUMU
分类号 H01L21/60 主分类号 H01L21/60
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