| 摘要 |
PROBLEM TO BE SOLVED: To form guide grooves wobbled on one side alone on an optical master disk only by one piece of exposure beam. SOLUTION: An exposure optical system for introducing a laser beam to the photoresist film to be formed as the optical master disk is internally provided with a light quantity modulator for modulating the light quantity of the laser beam and a deflection modulator for deflecting and modulating the laser beam. The light quantity modulation of the laser beam by the light quantity modulator and the deflection modulation of the laser beam by the deflection modulator are executed by synchronizing the frequency modulation signal formed by frequency modulation of address information, by which the guide grooves 12 wobbled on one side alone are formed on the photoresist film. Then, such guide grooves 12 are formed only by one piece of the exposure beam for exposing the photoresist film and, therefore, the control is facilitated and the formation accuracy of the guide grooves is enhanced. |
