| 摘要 |
PROBLEM TO BE SOLVED: To achieve a long life and to make it possible to perform high-speed operation by providing first and second ultrasonic exciting means separately in the circumferential direction of a stator, and driving the first and second ultrasonic driving means with the phase difference being provided. SOLUTION: First and second ultrasonic vibration generating parts 5 and 6, which are constituted by the same way, respectively, are connected to the outer surface part of a stator 1. The first and second ultrasonic vibration generating parts 5 and 6 are arranged separately at an angle of 45 deg. in the circumferential direction of the stator 1. Then, high-frequency power supplies 9 and 10 are connected to both vibrators 5a and 6a provided at both ultrasonic vibration generating ports 5 and 6. The frequencies of the respective high-frequency power supplies 9 and 10 are set so as to have the time-phase difference of 90 deg. to each other. Together with this setting of the separation angle of 45 deg. for both ultrasonic vibration generating parts 5 and 6, the six-dimensional deflection vibrating mode, which is indicated by G6 and advances in the circumferential direction, is generated in the stator. Thus, the long life can be achieved, and the high-seed operation can be performed. |
