| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to inspect a specimen without strain by vacuum- sucking the rear surface of the specimen to the ultrasonic wave incident surface to the sucking surface, and reciprocatingly switching the state that the sucking surface is floated over a liquid surface and the state that the specimen is dipped in the liquid. SOLUTION: A vacuum pump 6 is operated, and the surface of water 2 is lowered from the sucking surface of a vacuum suction board 4 by an elevator 3. A specimen 5 is grasped by the hand 9a of a conveyor 9, and mounted on the surface. Solenoid valves 7, 8 are opened and closed, and the specimen 5 is sucked to the surface. Then, the surface of the water 2 is raised by the elevator 3, dipped in the water in the state the specimen 2 is sucked, and an ultrasonic inspection is started. After the inspection is ended, the surface is floated, the valves 7, 8 are closed and opened, the suction force is released, the specimen 5 is grasped by the hand 9a, and moved to a predetermined position. During measurement, even if water flows by the movement of a probe 11, there is no fear of deviating the specimen 5, and since the entire surface of the specimen 5 is sucked, it can be measured without crack or strain. |
