发明名称 |
Struktur und Verfahren zur Integration von DMD mit Kontrollschallkreise aufweisenden Substraten |
摘要 |
DMD projection light values for HDTV have various manufacturing requirements, including the high yield integration of the DMD superstructue 213 on top of an underlying CMOS address circuit 126. The CMOS chip surface contains several processing artifacts 110, and 124, that can lead to reduced yield for the DMD superstructure. A modified DMD architecture and process are disclosed that minimizes the yield losses caused by these CMOS artifiacts while also reducing parasitic coupling of the high voltage reset pulses to the underlying CMOS address circuitry. <IMAGE> |
申请公布号 |
DE69126923(D1) |
申请公布日期 |
1997.09.04 |
申请号 |
DE1991626923 |
申请日期 |
1991.05.24 |
申请人 |
TEXAS INSTRUMENTS INC., DALLAS, TEX., US |
发明人 |
HORNBECK, LARRY J., VAN ALSTYNE TEXAS 75095, US |
分类号 |
H01L21/8238;G02B26/08;H01L21/312;H01L27/092 |
主分类号 |
H01L21/8238 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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