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发明名称
PURAZUMASHORISOCHI
摘要
申请公布号
JP2649333(B2)
申请公布日期
1997.09.03
申请号
JP19950045077
申请日期
1995.02.10
申请人
HANDOTAI ENERUGII KENKYUSHO KK
发明人
SUZUKI KUNIO;FUKADA TAKESHI;KANEHANA MIKIO;ABE MASAYOSHI;SHIBATA KATSUHIKO;USUDA MASATO;ISHIDA NORYA;SATAKE AKEMI;ARAI YASUYUKI
分类号
C23C16/24;C23C16/50;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/205;H01L21/306
主分类号
C23C16/24
代理机构
代理人
主权项
地址
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