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发明名称
ROKOSOCHI
摘要
申请公布号
JP2649543(B2)
申请公布日期
1997.09.03
申请号
JP19880135616
申请日期
1988.06.03
申请人
KYANON KK
发明人
TERAJIMA SHIGERU;AMAMYA MITSUAKI
分类号
G03F7/20;H01L21/027;H01L21/30;(IPC1-7):H01L21/027
主分类号
G03F7/20
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代理人
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