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发明名称
MASUKUHOJISOCHI
摘要
申请公布号
JP2649556(B2)
申请公布日期
1997.09.03
申请号
JP19880218525
申请日期
1988.09.02
申请人
KYANON KK
发明人
FUJIOKA HIDEHIKO;CHIBA JUJI;KUNO MITSUTOSHI;KARYA TAKUO;SHIMODA ISAMU
分类号
G03F7/20;H01L21/027;H01L21/30;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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