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发明名称
SHORISOCHI
摘要
申请公布号
JP2649822(B2)
申请公布日期
1997.09.03
申请号
JP19880080298
申请日期
1988.03.31
申请人
TOKYO EREKUTORON KK
发明人
MORYAMA MASASHI
分类号
H01L21/677;H01L21/027;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/677
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代理人
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