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发明名称
SPECIMEN HOLDER AND APPARATUS FOR TWO-SIDED ION MILLING SYSTEM
摘要
申请公布号
EP0792447(A1)
申请公布日期
1997.09.03
申请号
EP19950938966
申请日期
1995.10.30
申请人
GATAN, INC.
发明人
SWANN, PETER, R.;ALANI, REZA
分类号
G01N1/28;G01N1/32;H01J37/20;H01J37/30;(IPC1-7):G01N1/32
主分类号
G01N1/28
代理机构
代理人
主权项
地址
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