| 摘要 |
PROBLEM TO BE SOLVED: To prevent a wafer from becoming warped by maintaining under control the temperatures of a grooved roller for guiding a wire set to the working part of a wire saw at a specified temperature level. SOLUTION: The temperatures of a working liquid recovered from a wire array 24 after being supplied to the wire line 24 are detected using a temperature sensor 70 installed on a trough 63. A controller 72 controls the temperatures of the working liquid in a working liquid storage tank 38 by controlling the number of rotations of a temperature adjusting pump 64, so that the temperatures of the working liquid detected by the temperature sensor 70 are set to a specified set temperature level (constant temperatures). That is, the temperatures of the working liquid recovered from the wire array 24 which indicates almost the same temperatures as those of the grooved roller 22, are detected, and the temperatures of the working liquid to be supplied to the wire array 24 are adjusted so that the temperatures of the working liquid are constant. Thus it is possible to maintain the temperatures of the grooved roller 22 at a constant temperature level. Consequently, a wafer is protected against a warping phenomenon caused by the temperature variation of the grooved roller 22. |
