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发明名称
ETCHING METHOD IN TUNGSTEN CVD REACTION CHAMBER
摘要
申请公布号
JPH09228053(A)
申请公布日期
1997.09.02
申请号
JP19960033878
申请日期
1996.02.21
申请人
NEC CORP
发明人
AKIYAMA TAKAO
分类号
C23C16/44;C23C16/455;H01L21/28;H01L21/285;H01L21/302;H01L21/3065;(IPC1-7):C23C16/44;H01L21/306
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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