| 摘要 |
PROBLEM TO BE SOLVED: To polish the side surface of a workpiece with abrasive grains existing between a vibrating plate and a rotating workpiece by putting the side of the workpiece of cylindrical ceramics between a pair of plates, and supplying liquid containing the abrasive grain lower in hardness than the workpiece to the circumference of the workpiece as these plates are vibrated to rotate the workpiece on its axis. SOLUTION: The side of a workpiece 10 of cylindrical ceramics is put between a pair of plates 5, 8, and as these plates 5, 8 are vibrated to rotate the workpiece 10 on its axis, liquid containing abrasive grains 19 lower in hardness than the workpiece is supplied to the circumference of the workpiece to polish the side surface of the workpiece 10 with the abrasive grains 19 existing between the vibrating plates 5, 8 and the side surface of the workpiece 10 rotating on its axis. Since the workpiece is machined as the plates 5, 8 are vibrated to rotate the workpiece on its axis, a spindle head to rotate the workpiece and a motor become unnecessary to simplify the whole of a unit. As the hardness of the abrasive grain is low, there is no possibility to injure the surface of the workpiece, and extremely fine surface roughness can therefore be obtained, and moreover, since solid phase reaction is generated between a soft abrasive grain and the hard workpiece, machining efficiency is improved, and required machining time is shortened. |
