| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cassette for substrates, which has a solid structure, withstands transfer carried out by a robot and has long service life, whose outlet and inlet for substrates are not deformed, and in which a constant pitch between respective tooth-like receiving shelf pieces can be maintained. SOLUTION: A cassette is provided with a first edging frame 50 formed into a rectangular shape, which is disposed at a forward opening peripheral part 5 of a substrate containing space 2 and which holds the forward opening peripheral part 5, and a second edging frame 60 formed into a rectangular shape, which is disposed at a rearward opening peripheral car part 6 of the substrate containing space 2 and which holds the rearward opening peripheral part 6. A first main frame 10, a second main frame 20, intermediate teeth pieces 30, rearward stoppers 40, the first edging frame 50 and the second edging frame 60 are assembled together to form them as a rectangular frame body.</p> |
