| 摘要 |
A physical quantity which is emitted from a sample to be detected and which changes with the passage of time, is measured at a predetermined time interval, and abnormality of the sample is detected based on the obtained series data. A plurality of first vectors of a suitable dimension are formed from the time series data, the first vectors are advanced in parallel for a suitable period of time to form second vectors, a, deviation is calculated between the second vectors and the first vectors that are formed, the calculated deviation is compared with a preset threshold value, and whether the sample is abnormal or not is determined based upon the result of comparison. <IMAGE> |
