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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH09228041(A)
申请公布日期
1997.09.02
申请号
JP19960030780
申请日期
1996.02.19
申请人
HITACHI LTD
发明人
UMEHARA SATOSHI;SETOYAMA HIDETSUGU;KAMEI MITSUHIRO;TANAKA TAKESHI
分类号
C23C14/34;C23C14/35;H01F41/18;H01F41/30;(IPC1-7):C23C14/35
主分类号
C23C14/34
代理机构
代理人
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地址
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