发明名称 PROCEDE DE FORMATION DE REVETEMENTS DE TI1-XALXN
摘要 A method for forming a Ti1-xAlxN coating on a part, wherein a chemical vapour deposition chamber is heated to 250-500 DEG C; the part to be coated is heated to 550-650 DEG C and placed in said chamber; and a mixture of titanium and aluminium chlorides, NH3 and H2 is injected into the chamber. The molar amount of NH3 is greater than the molar amount of chlorides, and the molar amount of hydrogen is over five times greater than the molar amount of chlorides.
申请公布号 FR2745299(A1) 申请公布日期 1997.08.29
申请号 FR19960002699 申请日期 1996.02.27
申请人 CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS 发明人 MADAR ROLAND;BLANQUET ELISABETH;DUTRON ANNE MARIE;ROUAULT ALAIN;BERNARD CLAUDE
分类号 C23C16/34;C23C16/40;C23C16/448;(IPC1-7):C23C16/08 主分类号 C23C16/34
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