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发明名称
Process for preparing a superconducting thin oxide film
摘要
申请公布号
EP0486055(B1)
申请公布日期
1997.08.27
申请号
EP19910119544
申请日期
1991.11.15
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
NAGAISHI, TATSUOKI;HATTORI, HISAO;ITOZAKI, HIDEO
分类号
C23C14/08;C23C14/28;H01L39/24;(IPC1-7):H01L39/24
主分类号
C23C14/08
代理机构
代理人
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地址
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