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发明名称
JOATSUCVDSOCHI
摘要
申请公布号
JP2647997(B2)
申请公布日期
1997.08.27
申请号
JP19900161682
申请日期
1990.06.20
申请人
YAMAGATA NIPPON DENKI KK
发明人
MARUYAMA MASAHIKO
分类号
H01L21/205;C23C16/44;C23C16/455;C30B25/14;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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