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发明名称
JUNSUTAGAGATAHAKUMAKUTORANJISUTANOSEIZOHOHO
摘要
申请公布号
JP2646977(B2)
申请公布日期
1997.08.27
申请号
JP19930297141
申请日期
1993.11.29
申请人
NIPPON DENKI KK
发明人
TANABE HIROSHI
分类号
H01L29/78;H01L21/336;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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