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发明名称
HANDOTAISOCHIOYOBISONOSEIZOHOHO
摘要
申请公布号
JP2648134(B2)
申请公布日期
1997.08.27
申请号
JP19950133672
申请日期
1995.05.31
申请人
YAMAGATA NIPPON DENKI KK
发明人
YAMAZAKI SATOSHI
分类号
H01L21/82;H01L27/10;(IPC1-7):H01L27/10
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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