发明名称 Method of manufacturing semiconductor elements with active structures
摘要 The manufacturing method has a number of semiconductor elements (2) with active structures (3) formed in the surface of a semiconductor wafer (1) immediately adjacent one another. Each semiconductor element has a surface area which is greater than that of the active structure, with several identical active structures formed within each semiconductor element.Only one active structure is contacted by the semiconductor element, the physical parameters of the active structures measured to determine which active element is contacted.
申请公布号 EP0791958(A1) 申请公布日期 1997.08.27
申请号 EP19970101700 申请日期 1997.02.04
申请人 GENERAL SEMICONDUCTOR IRELAND 发明人 IGEL, GUENTER, DIPL.-ING.
分类号 H01L21/78;H01L27/02 主分类号 H01L21/78
代理机构 代理人
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