| 摘要 |
PURPOSE:To improve the machinability of the upper electrode of an oxide ferroelectric body and at the same time achieve conformity with a contact hole. CONSTITUTION:An upper electrode out of upper and lower electrodes sandwiching a ferroelectric body is in lamination structure of Pt 110 and WSi2 111 and the Pt 110 in contact with a ferroelectric body 109 is thinned. Machinability can be improved by thinning Pt. Also, by using a metal silicide which is not soluble to or is solution-retardant to such fluoric acid solution as WSi2, PdSi2, and PiS for the electrode material of the uppermost layer, W, Ti, TiN, TiW, Al, and Al alloy with improved machinability other than Pt can be utilized for the electrode material under it, thus further improving the machinability of the electrode. Also, the contact hole can be washed by fluoric acid, thus obtaining improved contact characteristics. By using oxide film l 12 with the silicide 111 at the uppermost layer as a machining mask, the residue of a side-wall deposit onto a pattern can be prevented even if Pt is used as an upper lamination electrode material. |
