申请人 |
SHIN-ETSU HANDOTAI COMPANY LIMITED;MIMASU SEMICONDUCTOR INDUSTRY COMPANY LIMITED;OHTOMO CHEMICAL IND. CORP.;HITACHI ZOSEN METAL WORKS CO., LTD |
发明人 |
TOYAMA, KOHEI;KIUCHI, ETSUO;HAYAKAWA, KAZUO;KABURAGI, SHINGO;ASHIDA, AKIO;ITO, TAKARA;NOAMI, KUNIAKI |