发明名称 Method for reusing water soluble slurry waste fluid
摘要 <p>A system for reusing water soluble slurry waste fluid wherein separated available abrasive grains and extracted water soluble coolant are reused. This system is capable of reducing a disposal cost due to a reduction of a load to a waste water disposal plant by effectively reusing water soluble slurry waste fluid, and making a contribution to a reduction of a total slicing cost by reusing abrasive grains and water soluble coolant. &lt;IMAGE&gt;</p>
申请公布号 EP0791385(A1) 申请公布日期 1997.08.27
申请号 EP19970102600 申请日期 1997.02.18
申请人 SHIN-ETSU HANDOTAI COMPANY LIMITED;MIMASU SEMICONDUCTOR INDUSTRY COMPANY LIMITED;OHTOMO CHEMICAL IND. CORP.;HITACHI ZOSEN METAL WORKS CO., LTD 发明人 TOYAMA, KOHEI;KIUCHI, ETSUO;HAYAKAWA, KAZUO;KABURAGI, SHINGO;ASHIDA, AKIO;ITO, TAKARA;NOAMI, KUNIAKI
分类号 B24B57/00;B01D21/01;B28D1/02;B28D7/02;(IPC1-7):B01D21/01 主分类号 B24B57/00
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