| 摘要 |
PURPOSE:To allow high photoelectric conversion output to be obtained by realizing an electric series connection of unit photoelectric conversion elements through a connection made on the back of a semiconductor film composed of a first back electrode film of one of mutually neighboring photoelectric conversion elements and a second back electrode film of the other thereof. CONSTITUTION:On the back side of semiconductor film 2, a first back electrode film 3 is formed by opening a hole from an insulating film 4 by, e.g., injection of a laser beam or etching, and a second back electrode film 5, adjacent to the first back electrode, is buried so as to extend from the first back electrode. This forms neighboring unit photoelectric transfer elements SC1, SC2, SC3... that are electrically connected in series with each other. Accordingly, when a photoelectromotive force device is viewed from the light-irradiating side, an invalid area in a light receiving region that does not contribute to photoelectric conversion operation is reduced substantially to an area occupied by a partitioning part for separating a light receiving surface electrode film 1 into each element. As a result, no valid area is lost because of the series connection. Accordingly, it is possible to obtain a photoelectric conversion output which is less subject to loss in addition to a reduced resistance loss due to the light receiving surface electrode. |
