发明名称 Semiconductor device having a t-shaped field oxide layer and a method for fabricating the same
摘要 A semiconductor device having an adjacent P-well and N-well, such as a complementary metal oxide semiconductor (CMOS) transistor, on a silicon on insulator (SOI) substrate has a latch-up problem caused by the parasitic bipolar effect. This invention provides a semiconductor device removing the latch-up problem and methods for fabricating the same. A semiconductor device according to the present invention has a T-shaped field oxide layer connected to a buried oxide layer of the SOI substrate to prevent the latch-up problem.
申请公布号 GB9713427(D0) 申请公布日期 1997.08.27
申请号 GB19970013427 申请日期 1997.06.25
申请人 HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. 发明人
分类号 H01L21/76;C25D5/26;H01L21/20;H01L21/762;H01L27/08;H01L27/12;H01L29/786;H01M2/02;H01M6/06;H01M6/08 主分类号 H01L21/76
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