| 摘要 |
PROBLEM TO BE SOLVED: To obtain X-ray diffraction information about a microscopic region of 1μm or lower by a method wherein only diffracted X-rays from a limited microscopic region out of an X-ray irradiated region on a sample are reflected by a curved crystal monochromator so as to be detected. SOLUTION: A Johannson-type curved crystal monochromator 48 is arranged in such a way that its convergence circle 50 passes an X-ray irradiated region on a sample 36. X-rays which are radiated from an X-ray source 38 are narrowed down to a thin beam by a collimator 40 having a hole diameter of 10μm so as to irradiate the sample 36. Out of diffracted X-ray 58 from the sample 36, the only diffracted X-rays from a microscopic target point 42 of 1μm or lower satisfy a reflection condition at the curved crystal monochromator 48 so as to be reflected, and the reflected diffracted X-rays are detected by an X-ray detector 52.
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