| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode plate for plasma etching reduced in consump tion by etching, excellent in produce yield and consisting of a vitreous carbon material. SOLUTION: This electrode plate consists of a vitreous carbon material wherein the ratio R of the intensity IA of the spectrum appearing in 1060±100cm<-1> band to the intensity IB of the spectrum appearing in 1580±100cm<-1> band and the average lattice spacing d002 (in Å) of the graphite hexagonal reticular face layer suffice the formula R>=(d002 -3.344)/0.135 in the Raman spectrum analysis using an argon ion laser beam of 5145Åwavelength. |
