| 摘要 |
PROBLEM TO BE SOLVED: To stably obtain silicon nitride ceramics high in strength, toughness, reliability and oxidation resistance with high reproducibility by using a specified nitrogen-containing silane compd. mainly comprising silicon diimide as a starting material. SOLUTION: The nitrogen-containing silane compd. having >=100nm average grain size, 1.4-1.9g/cm<3> true density, 0.045-0.090g/cm<3> bulk density, 600-1000m<2> /g specific surface area, 45.5-51.5wt.% nitrogen content, 44.5-51.5wt.% silicon content, <=3.5wt.% oxygen content, less than 0.25wt.% carbon content, <=180ppm halogen content and <=100ppm metallic impurity is used. This production method of ceramics is not restricted, but a solution of halogenated silane and an org. solvent is supplied to alloy to react to an org. solvent layer of a reaction system separated into two layers by a specific density difference between liquid ammonia and the org. solvent which does not dissolve into the ammonia and has larger specific density. Pressure is set to 0.54-13.6atm and reaction temp. is set to -45 to 36 deg.C. |
