| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize an angular velocity sensor by simplifying configuration and at the same time improve accuracy. SOLUTION: A magnetic field generation part 10 forms a DC bias magnetic field between two magnetic cores 11 and 12. A vibrator 30 vibrates a support member 20 up and down within the bias magnetic field. When the support member 20 being vibrated rotates at an angular velocity of ω, coriolis force is applied to the support member 20 and the support member 20 is displaced so that it is inclined. When the support member 20 is displaced, an angle formed by variable inductance elements 21 and 22 and the bias magnetic field changes and the inductance of the variable inductance elements 21 and 22 changes. Therefore, the angular velocity (1) can be obtained by detecting a signal corresponding to the inductance of the variable inductance elements 21 and 22. |
