发明名称 Process for preparation of small glass electrode
摘要 A small glass electrode and process for preparation thereof are disclosed. This small glass electrode is characterized in that said glass electrode, which has a bonded structure comprises a reference electrode composed of silver/silver chloride, a glass substrate having a pad embedded therein, said pad being composed of gold or platinum and circuit-connected to the reference electrode, and a silicon substrate having a (100) plane selectively etched by the anisotropic etching technique and comprising a groove for injecting an electrolyte composed of an aqueous solution containing chlorine such as KCl, or HCl, at least one hole for holding the electrolyte and a glass film formed in a portion corresponding to the reference electrode. By this structure, the small glass electrode can be easily manufactured at a low cost.
申请公布号 US5660741(A) 申请公布日期 1997.08.26
申请号 US19950463925 申请日期 1995.06.05
申请人 FUJITSU LTD. 发明人 SUZUKI, HIROAKI;SUGAMA, AKIO;KOJIMA, NAOMI
分类号 G01N27/36;G01N27/403;G01N27/414;(IPC1-7):H01L21/00 主分类号 G01N27/36
代理机构 代理人
主权项
地址
您可能感兴趣的专利