发明名称 MOS GATE SCHOTTKY BARRIER TRANSISTOR
摘要 PROBLEM TO BE SOLVED: To provide a high efficiency switching transistor which is formed into a microminiaturization with a high operation speed and high input impedance and greater mutual conductance Gm, and further with high integration. SOLUTION: A MOS gate is formed on a Schottky junction 5, and for example the thickness of Schottky metal 2 is made extremely thin whereby electric resistance in the vicinity of the Schottky junction part just under the MOS gate is made higher. Hereby, the equivalent height of a Schottky barrier in the vicinity of a MOS interface is altered owing to application of gate voltage. Hereby, a current flowing through the Schottky junction located in the vicinity of the MOS interface is mainly constructed with a current due to a flow of a carrier moving beyond the Schottky barrier.
申请公布号 JPH09223795(A) 申请公布日期 1997.08.26
申请号 JP19960027158 申请日期 1996.02.14
申请人 KIMURA MITSUTERU 发明人 KIMURA MITSUTERU
分类号 H01L29/872;H01L21/8242;H01L27/10;H01L27/108;H01L29/47;H01L29/78 主分类号 H01L29/872
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