LASER SYSTEM THAT CAN FORECAST USEFUL LIFE OF COMPOMEMT AND METHOD OF FORECASTING

摘要

PROBLEM TO BE SOLVED: To provide a diagnostic subroutine for the use with the control system of a gas discharge laser. SOLUTION: The subroutine provides the forecast of the remaining useful life of each auxiliary system that is restricted by the pulses in a laser system based on the real time operation of the laser system. The calculated average pulse repetition rate during the time interval that is defined by a user is used as the base for forecasting the remaining useful life of each auxiliary system that is restricted by the pulses under current operating state and the forecasted remaining period is revised continuously corresponding to the change of the operation of the laser. The forecasted remaining period is reported to the user and periodical maintenance plan is proceeded.