ASTIGMATISM CORRECTING METHOD FOR CHARGED PARTICLE BEAM APPARATUS,申请号JP19960030594-传众专利搜索

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发明名称	ASTIGMATISM CORRECTING METHOD FOR CHARGED PARTICLE BEAM APPARATUS
摘要
申请公布号	JPH09223476(A)	申请公布日期	1997.08.26
申请号	JP19960030594	申请日期	1996.02.19
申请人	JEOL LTD	发明人	OKI HIROBUMI
分类号	H01J37/153;(IPC1-7):H01J37/153	主分类号	H01J37/153
代理机构		代理人
主权项
地址

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