| 摘要 |
A liquid delivery system is provided, which enables to deliver a liquid source material at a specified flow rate without contamination of the source material and blocking of the delivering channel. A liquid forwarding device is provided for forwarding a liquid source material. The device has a communication path communicating with the channel. An elastic outer tubular member and an elastic inner member form the communication path therebetween. The device has ultrasonic vibrators placed onto the outer wall of the outer member. The vibrators vibrates the outer member to generate a surface acoustic wave travelling along the inner wall of the outer member. The travelling wave forwards the material existing in the communicating path. The device is controlled by a forwarding rate controller to adjust a forwarding rate of the material existing in the communication path. A flow rate of the material is sensed by a flow rate sensor. The forwarding rate is adjusted by changing vibration of the vibrators. The liquid source material is delivered in the channel at the specified flow rate by adjusting the ultrasonic vibration.
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