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发明名称
TATEGATANETSUSHORISOCHI
摘要
申请公布号
JP2645309(B2)
申请公布日期
1997.08.25
申请号
JP19880264346
申请日期
1988.10.20
申请人
TOKYO EREKUTORON KK
发明人
WATANABE SHINGO;ISHII KATSUMI
分类号
H01L21/22;H01L21/205;H01L21/31;(IPC1-7):H01L21/22
主分类号
H01L21/22
代理机构
代理人
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