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发明名称
KISOSEICHOSOCHI
摘要
申请公布号
JP2645474(B2)
申请公布日期
1997.08.25
申请号
JP19870049443
申请日期
1987.03.04
申请人
FUJITSU KK
发明人
KASAI KAZUMI
分类号
H01L21/205;C23C16/44;(IPC1-7):H01L21/205
主分类号
H01L21/205
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