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发明名称
KAKUSANBARYAKINOOJUSURUHANDOTAISOSHINODENKYOKUKEISEIHOHO
摘要
申请公布号
JP2645811(B2)
申请公布日期
1997.08.25
申请号
JP19950085909
申请日期
1995.03.20
申请人
ERU JII SEMIKON CO LTD
发明人
ZON SU BYON
分类号
H01L21/28;H01L21/318;H01L21/324;H01L21/822;H01L27/04;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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