发明名称 FUKIHATSUSEIHANDOTAIMEMORI
摘要 <p>In a method of applying a voltage pulse for injecting/extracting electrons into/from a non-volatile semiconductor memory in which high and low levels of a threshold voltage corresponding to presence and absence of storage of electrons are caused to correspond to binary information, the method includes the steps of generating a plurality of voltage pulses each having an ability of injecting or extracting only a portion of all electrons to be stored, and applying the plurality of voltage pulses to the non-volatile semiconductor memory to thereby carry out injection/extraction of all the electrons. Since the pulse of a Fowler-Nordheim current flowing through the tunnel insulating film by one voltage pulse is short, the density of holes produced in the tunnel insulating film by such a current pulse is extremely low. As a result, the number of holes trapped by a plurality of Fowler-Nordheim current pulses caused to flow by a plurality of voltage pulses is reduced, so the life time of the tunnel insulating film is prolonged.</p>
申请公布号 JP2645122(B2) 申请公布日期 1997.08.25
申请号 JP19890011186 申请日期 1989.01.20
申请人 TOSHIBA KK 发明人 YAMADA SEIJI;NARUGE KYOMI
分类号 G11C17/00;G11C16/04;G11C16/10;G11C16/14;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):G11C16/06;H01L21/824 主分类号 G11C17/00
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