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发明名称
SOSATONNERUKENBIKYO
摘要
申请公布号
JP2645363(B2)
申请公布日期
1997.08.25
申请号
JP19890163696
申请日期
1989.06.28
申请人
HIKARI GIJUTSU KENKYU KAIHATSU KK
发明人
TANAKA ICHIRO
分类号
H01J37/244;G01B7/34;G01N37/00;G01Q10/02;G01Q10/04;G01Q60/10;G01Q60/16;G05D3/00;H01J37/28;H01L41/083;(IPC1-7):G01N37/00
主分类号
H01J37/244
代理机构
代理人
主权项
地址
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