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发明名称
Verfahren zur Herstellung von EEPROM-Speicherzellen mit einer einzigen Polysiliziumebene und dünnem Oxyd mittels differenzierter Oxydation
摘要
申请公布号
DE69030544(T2)
申请公布日期
1997.08.21
申请号
DE19906030544T
申请日期
1990.08.28
申请人
SGS-THOMSON MICROELECTRONICS S.R.L., AGRATE BRIANZA, MAILAND/MILANO, IT
发明人
GHEZZI, PAOLO, I-26027 RIVOLTA D'ADDA (CREMONA), IT;RIVA, CARLO, I-20052 MONZA (MILANO), IT;VALENTINI, GRAZIA, I-20052 MONZA (MILANO), IT
分类号
H01L21/28;H01L21/316;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/336
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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