发明名称 KARAASATSUZOSOSHINOSEIZOHOHO
摘要 <p>PURPOSE:To obtain the color image pickup element having good color sepn. filters by forming a flattening layer by etch back. CONSTITUTION:The flattening layer is formed by the etch back. The etch back refers to uniform cutting off of the once formed layer by etching to generate a smooth surface. The formation of the flattening layer 12 by the etch back is executed by coating a flattening agent 12 consisting of a resin on the layer and curing the coating, then further coating a nonsolvent acryl monomer or nonsolvent acryl oligomer 13 thereon and curing the coating. The cured acryl layer 13 of the upper layer is completely removed by dry etching, etc., mainly using oxygen plasma after curing. The color image pickup element having the good color sepn. filters without generating unequalness on the dyed medium is thereby obtd.</p>
申请公布号 JP2641732(B2) 申请公布日期 1997.08.20
申请号 JP19880109097 申请日期 1988.05.06
申请人 DAINIPPON INSATSU KK 发明人 FUJITA MASANOBU
分类号 G02B5/20;H01L27/14;H01L31/02;(IPC1-7):G02B5/20 主分类号 G02B5/20
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