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发明名称
TENSHAYOBANPUNOSEIZOHOHO
摘要
申请公布号
JP2643141(B2)
申请公布日期
1997.08.20
申请号
JP19870074623
申请日期
1987.03.27
申请人
MATSUSHITA DENKI SANGYO KK
发明人
KAWAKITA TETSUO;HATADA KENZO
分类号
H01L21/60;H01L21/321;(IPC1-7):H01L21/321
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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