KASOODORUMINETSUSENSUSOKUTEISOCHI

摘要

PURPOSE:To measure the high efficiency of luminescence by providing a holding device three-dimensionally moving a sample at the first focal point of a rotary elliptic mirror and a screen removably installed at the second focal point position of the rotary elliptic mirror. CONSTITUTION:An electron beam E emitted from an electron gun 3 in a vacuum container 1 is focused by an electron beam optical system 4 and an electron lens 5 and radiated on a sample 7 mounted on an XYZ stage 6 in a spot shape. The radiation position can be displaced by an electron beam deflector 8. The XYZ stage 6 moves the sample 7 three-dimensionally. A screen 11 is removably provided at the second focal point B, a half-mirror 12 is arranged between this second focal point B and a lens 19. The cathode luminescence can be thereby measured with high efficiency.