Projection exposure apparatus with an aberration compensation device of a projection lens,申请号EP19910308996-传众专利搜索

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法人/股东/高管

发明名称	Projection exposure apparatus with an aberration compensation device of a projection lens
摘要
申请公布号	EP0480616(B1)	申请公布日期	1997.08.20
申请号	EP19910308996	申请日期	1991.10.01
申请人	CANON KABUSHIKI KAISHA	发明人	UNNO, YASUYUKI;ORII, SEIJI;YONEKAWA, MASAMI
分类号	G03F7/20;G03F7/207;(IPC1-7):G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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