PATAANETSUJIICHIKENSHUTSUHOHO

摘要

PURPOSE:To realize edge detection in response to various waveforms by defining the intersecting point between a high-degree polynomial which approximates a complicated 1-dimensional waveform rather faithfully and a low-degree polynomial which approximates said waveform rather roughly as a feature position of the waveform. CONSTITUTION:The intersecting point between a high-degree approximate polynomial which shows a 1-dimensional waveform rather faithfully and a low-degree approximate polynomial which shows said waveform rather roughly is defined as a feature position of the waveform. This feature position is obtained for an optional waveform as long as the waveform has unevenness. Then an edge position is calculated from the feature position. Thus the detection of an edge position is possible even with a pattern having a complicated edge form like an actual circuit pattern of a multi-layer structure. Furthermore, the edge position can be detected even with such a waveform that is deformed by the change in the magnification of an electronic microscope or the edge section form since the deformation toward a variable is taken into consideration in correspondence of feature positions between a reference pattern and a pattern to be measured.